LAM 810-102361R222联锁电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
LAM 810-102361R222 联锁电路板 是泛林半导体（LAM Research）设备中的一种关键组件，主要用于实现设备操作过程中的安全联锁功能。此电路板通过监控和控制设备运行状态，在必要时触发保护机制，确保半导体制造设备的安全运行，保护操作人员和工艺环境。
产品特点
安全联锁功能：
- 监控设备的状态（如门锁、气压、真空状态等），确保系统满足操作要求。
- 当检测到异常状态（如门未关闭或安全条件未满足）时，触发警报或切断关键操作，避免风险。
高可靠性设计：
- 采用工业级元器件，能够在高温、高湿度等严苛环境中稳定工作。
- 提供长时间无故障运行的能力，满足半导体制造设备的高可靠性需求。
模块化结构：
- 紧凑型设计，易于集成到不同设备中。
- 可与其他安全模块或系统无缝配合。
实时监控与快速响应：
- 内置高性能监控芯片，能够实时检测状态变化，并在毫秒级响应异常。
兼容性强：
- 专为 LAM Research 设备定制，与设备的其他控制系统兼容性良好。
技术规格（假设参考）
| 参数 | 说明 |
|---|---|
| 供电电压 | 24V DC 或根据设备要求定制 |
| 监控通道数 | 多通道设计，支持多点状态监测 |
| 响应时间 | < 5ms |
| 工作温度范围 | 0°C 至 70°C |
| 接口类型 | 标准信号接口（如TTL、I/O接口） |
| 尺寸 | 紧凑设计，适配设备内部空间 |
| 可靠性 | MTBF ≥ 100,000 小时 |
英文资料：
The LAM 810-102361R222 interlocking circuit board is a key component in LAM Research equipment, mainly used to implement safety interlocking functions during equipment operation. This circuit board monitors and controls the operating status of the equipment, triggering protective mechanisms when necessary to ensure the safe operation of semiconductor manufacturing equipment and protect operators and the process environment.
Product Features
Safety interlock function:
Monitor the status of equipment (such as door locks, air pressure, vacuum status, etc.) to ensure that the system meets operational requirements.
When an abnormal state is detected (such as a door not being closed or safety conditions not being met), an alarm is triggered or critical operations are cut off to avoid risks.
High reliability design:
Using industrial grade components, it can work stably in harsh environments such as high temperature and high humidity.
Provide the ability to operate without faults for a long time, meeting the high reliability requirements of semiconductor manufacturing equipment.
Modular structure:
Compact design, easy to integrate into different devices.
Can seamlessly integrate with other security modules or systems.
Real time monitoring and rapid response:
Built in high-performance monitoring chip, capable of real-time detection of status changes and responding to anomalies in milliseconds.
Strong compatibility:
Specially customized for LAM Research equipment, with good compatibility with other control systems of the equipment.
Technical specifications (assuming reference)
Parameter Description
Supply voltage 24V DC or customized according to equipment requirements
Multi channel design with multiple monitoring channels, supporting multi-point status monitoring
Response time<5ms
Working temperature range: 0 ° C to 70 ° C
Interface type: Standard signal interface (such as TTL, I/O interface)
Compact design to fit the internal space of the device
Reliability MTBF ≥ 100000 hours
2.产 品 展 示
3.其他产品
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