LAM 332-000474-000光学扩展器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
LAM 332-000474-000 光学扩展器模块 是泛林半导体(LAM Research)设备中一种关键的光学组件,通常用于光学信号处理或扩展相关功能。这类模块广泛应用于半导体加工设备中,例如用于监控、测量和控制制造过程中涉及的光学信号,如光刻、蚀刻、或沉积工艺。
产品特点
高精度光学性能:
- 设计用于高分辨率光学信号扩展或调节,能够精准处理多种波长的光信号。
- 支持复杂工艺下的光学监测或校准功能。
模块化集成:
- 紧凑型设计,易于集成到半导体制造设备的光学子系统中。
- 可与其他光学模块和控制系统无缝协作。
耐用性和可靠性:
- 采用高质量材料制造,耐受恶劣工艺环境(如高温、化学腐蚀气氛)。
- 优化的散热和抗干扰设计,确保模块的长期稳定运行。
可定制化:
- 支持特定应用的光学需求定制,例如特定波长范围或扩展倍率。
- 灵活的接口设计,可根据系统需求调整信号输入/输出格式。
应用灵活性:
- 模块可用于光学信号传输、功率调节、信号放大或其他相关功能。
技术规格(假设参考)
参数 | 描述 |
---|---|
波长范围 | 400 nm - 1100 nm(或按设备需求定制) |
扩展倍率 | 可选倍率,如 1x、2x、5x |
光损耗 | < 0.5 dB(典型值) |
接口类型 | 光纤接口或自由空间耦合 |
工作温度范围 | 0°C 至 70°C |
外壳材料 | 铝合金或其他抗腐蚀材料 |
尺寸 | 定制设计,适应设备集成需求 |
英文资料:
The LAM 332-000474-000 optical extender module is a critical optical component in LAM Research equipment, typically used for optical signal processing or expanding related functions. This type of module is widely used in semiconductor processing equipment, such as for monitoring, measuring, and controlling optical signals involved in manufacturing processes, such as photolithography, etching, or deposition processes.
Product Features
High precision optical performance:
Designed for high-resolution optical signal extension or adjustment, capable of accurately processing optical signals of multiple wavelengths.
Support optical monitoring or calibration functions under complex processes.
Modular integration:
Compact design, easy to integrate into optical subsystems of semiconductor manufacturing equipment.
It can seamlessly collaborate with other optical modules and control systems.
Durability and reliability:
Made with high-quality materials, it can withstand harsh process environments such as high temperatures and chemical corrosive atmospheres.
Optimized heat dissipation and anti-interference design ensure the long-term stable operation of the module.
Customizable:
Support customization of optical requirements for specific applications, such as specific wavelength ranges or expansion rates.
Flexible interface design allows for the adjustment of signal input/output formats according to system requirements.
Application flexibility:
The module can be used for optical signal transmission, power regulation, signal amplification, or other related functions.
Technical specifications (assuming reference)
Parameter description
Wavelength range 400 nm -1100 nm (or customized according to device requirements)
Expansion magnification options, such as 1x, 2x, 5x
Optical loss<0.5 dB (typical value)
Interface type: fiber optic interface or free space coupling
Working temperature range: 0 ° C to 70 ° C
Shell material: aluminum alloy or other corrosion-resistant materials
Customized size design to meet equipment integration requirements
2.产 品 展 示
3.其他产品
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