LAM 810-017075-013气体盒互锁模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
LAM 810-017075-013 是一款 气体盒互锁模块，主要用于半导体制造设备中的气体管理系统，确保气体流量和气体设备的安全互锁操作。以下是其主要特点：
气体互锁保护：该模块确保气体系统与其他设备的安全互锁，防止在不安全的情况下启动气体设备，避免气体泄漏和其他潜在危险。
实时监控：能够实时监控气体流量、压力等关键参数，并在异常情况下自动触发警报或保护机制。
多重安全保护：具备多重保护功能，如过压、过流和气体泄漏监测，确保设备安全稳定运行。
集成化设计：将气体互锁、监控和报警功能集成到一个模块中，简化系统架构，减少设备复杂性。
远程诊断与控制：支持远程监控和控制，便于操作员进行实时监测和故障诊断，提高设备维护效率。
兼容性强：与不同类型的气体设备和气体控制系统兼容，能够适应多种应用环境。
高可靠性与耐用性：采用工业级设计，能够在高温、高湿等恶劣环境下长期稳定工作。
模块化设计：便于安装、维护和替换，减少停机时间，确保生产线高效运行。
该气体盒互锁模块广泛应用于半导体、光电、化学加工等高精度制造领域，用于气体安全管理和保护，保障生产过程中气体设备的安全性和稳定性。
英文资料：
LAM 810-017075-013 is a gas box interlock module mainly used in gas management systems in semiconductor manufacturing equipment to ensure safe interlock operation of gas flow and gas equipment. The following are its main characteristics:
Gas interlock protection: This module ensures the safe interlock of the gas system with other equipment, preventing the start of gas equipment in unsafe situations and avoiding gas leaks and other potential hazards.
Real time monitoring: It can monitor key parameters such as gas flow rate and pressure in real time, and automatically trigger alarms or protection mechanisms in case of abnormal situations.
Multiple safety protection: Equipped with multiple protection functions, such as overvoltage, overcurrent, and gas leakage monitoring, to ensure the safe and stable operation of the equipment.
Integrated design: Integrating gas interlocking, monitoring, and alarm functions into one module, simplifying system architecture and reducing equipment complexity.
Remote diagnosis and control: Supports remote monitoring and control, facilitating real-time monitoring and fault diagnosis for operators, and improving equipment maintenance efficiency.
Strong compatibility: Compatible with different types of gas equipment and gas control systems, able to adapt to various application environments.
High reliability and durability: Adopting industrial grade design, it can work stably for a long time in harsh environments such as high temperature and high humidity.
Modular design: facilitates installation, maintenance, and replacement, reduces downtime, and ensures efficient operation of the production line.
This gas box interlock module is widely used in high-precision manufacturing fields such as semiconductors, optoelectronics, and chemical processing, for gas safety management and protection, ensuring the safety and stability of gas equipment during the production process.
2.产 品 展 示
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| 6410-023-N-N-N | HG104A6 | IMMFP03 |
| 6410-020-N-N-N | HP56B607 | INMMP11 |
