LAM 810-002895-102阀控制节点板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
LAM 810-002895-102 是一款 阀控制节点板,用于半导体制造设备中,负责控制气体阀门和其他流体系统的操作。以下是其主要特点:
精确阀门控制:能够精确控制气体或流体阀门的开关,确保生产过程中的气体流量和压力稳定。
多通道支持:支持多个阀门控制通道,适用于复杂的气体管理系统或多阀控制应用。
实时反馈与调整:提供实时数据采集和反馈,便于操作员调整阀门设定,确保系统运行的精度和稳定性。
高可靠性:设计符合工业级标准,能够在高温、高湿等恶劣环境中长期稳定运行。
远程监控与控制:支持远程监控和控制功能,方便操作员进行系统诊断、调节和故障排查。
集成化设计:集成阀门控制、状态监测和故障报警等功能,简化系统架构和维护工作。
安全保护功能:具备气体泄漏监测、过压保护等功能,确保设备安全运行,防止意外发生。
模块化安装:易于集成和安装,方便与其他控制系统和设备配合工作。
该阀控制节点板广泛应用于半导体生产线和精密设备中,确保气体控制系统的高效、安全运行,优化生产过程中的流体管理。
英文资料:
LAM 810-002895-102 is a valve control node board used in semiconductor manufacturing equipment to control the operation of gas valves and other fluid systems. The following are its main characteristics:
Precise valve control: capable of accurately controlling the opening and closing of gas or fluid valves, ensuring stable gas flow and pressure during the production process.
Multi channel support: Supports multiple valve control channels, suitable for complex gas management systems or multi valve control applications.
Real time feedback and adjustment: Provides real-time data collection and feedback to facilitate operators in adjusting valve settings, ensuring the accuracy and stability of system operation.
High reliability: Designed to meet industrial standards, capable of long-term stable operation in harsh environments such as high temperature and high humidity.
Remote monitoring and control: Supports remote monitoring and control functions, facilitating system diagnosis, adjustment, and troubleshooting for operators.
Integrated design: Integrating valve control, status monitoring, and fault alarm functions to simplify system architecture and maintenance work.
Safety protection function: equipped with gas leakage monitoring, overpressure protection and other functions to ensure the safe operation of equipment and prevent accidents from occurring.
Modular installation: easy to integrate and install, convenient to work with other control systems and devices.
This valve control node board is widely used in semiconductor production lines and precision equipment, ensuring the efficient and safe operation of gas control systems and optimizing fluid management in the production process.
2.产 品 展 示
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