LAM  810-073479-005气体盒主板 PDF资料

1.产 品 资 料 介 绍：

中文资料：

LAM 810-073479-005 是一款 气体盒主板，主要用于半导体制造设备中的气体控制和分配系统。以下是其主要特点：

1. 精确气体控制：提供精确的气体流量控制和分配功能，确保生产过程中的气体供应稳定可靠。

2. 多通道支持：支持多个气体通道的控制，可以同时管理多个气体源，提高生产效率。

3. 高灵敏度监控：集成气体传感器接口，可实时监控气体浓度和流量，确保安全和稳定运行。

4. 兼容性强：与多种气体类型和设备兼容，适应不同制造工艺需求。

5. 远程监控与管理：支持通过网络进行远程监控和诊断，便于设备管理和故障排查。

6. 保护功能：具备气体泄漏检测、过压保护等安全功能，防止设备和人员受到伤害。

7. 稳定性与耐用性：设计符合工业标准，能够在高温、湿度等恶劣环境下长期稳定运行。

8. 集成化设计：将气体控制和监控功能集成到一个模块中，减少设备体积，简化系统设计。

该气体盒主板广泛应用于半导体生产线、刻蚀、清洗等工艺中，确保气体的精准控制与安全使用，提升生产效率和设备安全性。

英文资料：

LAM 810-073479-005 is a gas box motherboard mainly used for gas control and distribution systems in semiconductor manufacturing equipment. The following are its main characteristics:

Accurate gas control: Provides precise gas flow control and distribution functions to ensure stable and reliable gas supply during the production process.

Multi channel support: supports control of multiple gas channels, can manage multiple gas sources simultaneously, and improve production efficiency.

High sensitivity monitoring: Integrated gas sensor interface, can monitor gas concentration and flow in real time, ensuring safe and stable operation.

Strong compatibility: Compatible with multiple gas types and devices, suitable for different manufacturing process requirements.

Remote monitoring and management: Supports remote monitoring and diagnosis through the network, facilitating device management and troubleshooting.

Protection function: It has safety functions such as gas leak detection and overpressure protection to prevent equipment and personnel from being injured.

Stability and durability: Designed to meet industrial standards, it can operate stably for a long time in harsh environments such as high temperature and humidity.

Integrated design: Integrating gas control and monitoring functions into one module, reducing equipment size and simplifying system design.

This gas box motherboard is widely used in semiconductor production lines, etching, cleaning and other processes to ensure precise control and safe use of gases, improve production efficiency and equipment safety.

2.产      品      展      示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidc

品牌：LAM 

型号：810-073479-005气体盒主板

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货