GRANVILLE-PHILLIPS 360120双真空离子计 PDF资料
1.产 品 资 料 介 绍:
中文资料:
GRANVILLE-PHILLIPS 360120 双真空离子计是一种高精度真空测量仪器,专用于超高真空(UHV)和极高真空(XHV)环境下的压力测量。此离子计适用于半导体、科研实验室和高能物理等需要准确压力控制的行业。它的双离子计设计能够提高测量的范围和稳定性,适应从高真空到极高真空的广泛压力范围。
产品特点
- 双离子计结构:双离子计设计确保在宽压力范围内提供准确、稳定的测量,尤其适合从低真空到超高真空的压力监控。
- 高灵敏度与精确性:能够测量从 到 Torr 的压力,精度极高,适合要求严格的应用环境。
- 快速响应时间:在高低真空转换时响应速度快,帮助用户即时了解真空状态。
- 多种输出选项:支持多种通信接口,如模拟和数字输出,便于与其他设备或系统集成。
- 耐用设计:采用耐腐蚀材料制成,适用于具有腐蚀性气体或粉尘的环境,同时延长设备使用寿命。
技术规格
- 压力范围: 到 Torr
- 响应时间:亚秒级
- 电源输入:一般为24V DC或110-240V AC(取决于具体型号)
- 工作温度:-20°C 至 50°C
- 接口:提供多种信号输出选项,包括模拟输出和RS-232/RS-485数字接口
- 尺寸与重量:紧凑设计,易于安装在实验设备或生产线中
应用领域
- 半导体制造:广泛应用于真空镀膜、离子注入和蚀刻等设备,确保工艺真空度。
- 科研实验室:用于核物理、材料科学等实验中的真空环境测量。
- 高能物理:在粒子加速器、质谱仪等设备中监测真空状态。
- 航天和航空:用于空间模拟和真空测试设备中,确保高真空环境的维持。
使用和维护
- 维护简单:模块化设计使得更换和校准离子计头更加便捷。
- 自动诊断功能:该设备具有自检功能,能自动检测运行状态并提醒用户进行维护或故障排除。
- 定期校准:建议根据设备使用频率和真空环境,定期进行校准,确保测量精度。
英文资料:
GRANVILLE-PHILLIPS 360120 dual vacuum ionizer is a high-precision vacuum measuring instrument designed for pressure measurement in ultra-high vacuum (UHV) and extremely high vacuum (XHV) environments. This ion meter is suitable for industries such as semiconductors, research laboratories, and high-energy physics that require accurate pressure control. Its dual ion meter design can improve the measurement range and stability, adapting to a wide pressure range from high vacuum to extremely high vacuum.
Response time: sub second level
Power input: Generally 24V DC or 110-240V AC (depending on the specific model)
Working temperature: -20 ° C to 50 ° C
Interface: Provides multiple signal output options, including analog output and RS-232/RS-485 digital interface
Size and weight: Compact design, easy to install in experimental equipment or production lines
application area
Semiconductor manufacturing: widely used in equipment such as vacuum coating, ion implantation, and etching to ensure the vacuum degree of the process.
Research laboratory: used for vacuum environment measurement in experiments such as nuclear physics and materials science.
High energy physics: monitoring the vacuum state in equipment such as particle accelerators and mass spectrometers.
Aerospace and aviation: used in space simulation and vacuum testing equipment to ensure the maintenance of high vacuum environments.
Usage and maintenance
Easy maintenance: Modular design makes it more convenient to replace and calibrate ion meter heads.
Automatic diagnostic function: This device has a self checking function, which can automatically detect the operating status and remind users to perform maintenance or troubleshooting.
Regular calibration: It is recommended to perform regular calibration based on the frequency of equipment use and vacuum environment to ensure measurement accuracy.
2.产 品 展 示
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