Brooks 002-7391-35预先定位器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Brooks 002-7391-35 预先定位器 是Brooks Automation专为晶圆处理设计的高精度预定位设备，主要用于半导体制造和检测过程中晶圆的初步定位，确保在进一步的搬运和处理之前晶圆达到最佳的初始位置。它能够提供精确的晶圆定位和对齐支持，有助于保证后续工序中的操作精度。
主要特点：
高精度定位：
- 002-7391-35预先定位器配备精密的定位系统，能够在微米级别对晶圆进行调整。这种高精度定位确保晶圆在进入主要处理流程前已经在理想位置，从而减少误差的累积。
快速对齐和调整：
- 设备设计具有快速调整功能，能够迅速完成晶圆的对齐与初始定位，帮助生产线提高整体速度和效率。对于需要高吞吐量的生产环境，它能够提供短暂的对齐时间而不牺牲精度。
灵活的兼容性：
- 预先定位器能够兼容不同尺寸的晶圆以及多种类型的搬运和处理设备，适应各种自动化流程的需求。这一灵活性使其可以集成到不同的半导体制造生产线中，提升系统的适应性。
洁净室兼容：
- 002-7391-35符合洁净室的高标准要求，采用低颗粒材料和低污染设计，以确保在无尘环境中安全操作，避免晶圆受到污染影响其质量。
可靠的结构设计：
- 该定位器采用坚固的结构，保证其在连续工作环境中的稳定性和耐用性，适合长时间高负荷的半导体生产和检测流程。设备结构设计还便于维护，降低了运维成本。
智能监控与反馈系统：
- 预定位器配有智能监控系统，实时反馈设备的定位状态和精度，确保晶圆在进入下一环节前符合要求。若发生定位偏差或异常，系统会立即提醒操作人员，保证生产的高质量和一致性。
英文资料：
The Brooks 002-7391-35 pre positioning device is a high-precision pre positioning equipment designed by Brooks Automation specifically for wafer processing. It is mainly used for preliminary positioning of wafers in semiconductor manufacturing and testing processes, ensuring that the wafers reach the optimal initial position before further handling and processing. It can provide precise wafer positioning and alignment support, helping to ensure operational accuracy in subsequent processes.
Main features:
High precision positioning:
The 002-7391-35 pre locator is equipped with a precise positioning system that can adjust wafers at the micrometer level. This high-precision positioning ensures that the wafer is in the ideal position before entering the main processing flow, thereby reducing the accumulation of errors.
Quick alignment and adjustment:
The equipment design has a quick adjustment function, which can quickly complete wafer alignment and initial positioning, helping the production line improve overall speed and efficiency. For production environments that require high throughput, it can provide brief alignment time without sacrificing accuracy.
Flexible compatibility:
The pre locator is compatible with wafers of different sizes and various types of handling and processing equipment, adapting to the needs of various automation processes. This flexibility allows it to be integrated into different semiconductor manufacturing production lines, enhancing the adaptability of the system.
Cleanroom compatibility:
002-7391-35 meets the high standard requirements of cleanrooms, using low particle materials and low pollution design to ensure safe operation in a dust-free environment and avoid wafer contamination affecting its quality.
Reliable structural design:
The locator adopts a sturdy structure to ensure its stability and durability in continuous working environments, suitable for long-term high load semiconductor production and testing processes. The equipment structure design is also easy to maintain, reducing operation and maintenance costs.
Intelligent monitoring and feedback system:
The pre locator is equipped with an intelligent monitoring system that provides real-time feedback on the positioning status and accuracy of the equipment, ensuring that the wafer meets the requirements before entering the next stage. If there is a positioning deviation or abnormality, the system will immediately remind the operator to ensure high quality and consistency of production.
2.产 品 展 示
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5.更多库存型号
| PMB31B-10201-00 | 07ZE63R302 | P22NRXA-LNF-NS-00 |
| PMB31B-10200-03 | AMAT 0100-01488 | 57160001-TZ DSTD 110 |
| PMB31B-10200-02 | AMAT 0100-03133 | PFTL301E 0.2KN 3BSE019050R200 |
| PMB31B-10200-01 | 07EB200 | P21NRXA-LSS-NS-02 |
| PMB31B-10200-00 | NPSI02 | M22NRXB-LDN-NS-00 |
| PMB31B-10116-03 | NKAS11 | M22NRXB-LNN-NS-00 |
| PMB31B-10116-02 | AMAT 0100-91085 | PFTL201CE 10.0KN |
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