Brooks 02-169208-00晶圆处理机器人 PDF资料

1.产 品 资 料 介 绍：

中文资料：

Brooks 02-169208-00 晶圆处理机器人 是Brooks Automation公司专为半导体制造和晶圆处理设计的自动化机器人。这款机器人用于在晶圆处理流程中完成精确的搬运、定位和传输，适用于无尘室等高洁净度环境。其可靠的设计、精准的控制系统和高效的搬运能力，使其成为半导体生产和检测工艺中的重要工具。

主要特点：

1. 高精度搬运：

• Brooks 02-169208-00 机器人能够实现微米级的晶圆定位，保证晶圆在传输过程中的精确度。其高精度设计适应了半导体制造中极小误差容忍度的需求。
• 其控制系统提供了平滑稳定的运动路径，从而减少搬运过程中对晶圆的振动，降低晶圆破损的风险。

2. 多轴控制与灵活操作：

• 配备多轴控制系统，支持多方向、多角度的自由运动。机器人能够轻松进行平移、旋转、倾斜等复杂运动，以适应各类设备的不同进出口需求。
• 灵活的设计使其能够在狭小或复杂的设备布置中自如运作，增加生产线布置的多样性。

3. 高速搬运能力：

• 该机器人能够以较快的速度完成晶圆搬运，优化了工艺步骤之间的传输时间，从而提高了整个生产线的效率。其快速响应系统确保在保持精度的前提下，实现高速传输。

4. 洁净室兼容设计：

• Brooks 02-169208-00 的材质和结构设计符合洁净室的严格标准，具有低颗粒生成和低污染风险，适合在洁净室环境中长时间稳定运行，保护晶圆免受污染。
• 防尘设计以及高耐用性材料使其能够在洁净室中运作，并最大限度减少对环境的干扰。

5. 智能监控与自我诊断：

• 配有智能化监控系统，可实时监测搬运和操作状态，并提供故障检测和诊断功能。该自诊断功能能够帮助运维团队及时发现并解决问题，降低意外停机的风险。
• 支持与上位机连接，能够对运行状态、性能指标等进行数据分析和记录，帮助优化生产效率。

6. 模块化设计：

• 设计上具有模块化结构，便于与其他Brooks设备或第三方晶圆处理设备集成。模块化设计便于扩展、升级和维护，为生产线的柔性化提供了支持。
• 该特性使其能够根据特定需求进行配置和调整，以满足不同晶圆尺寸或工艺流程的要求。

英文资料：

The Brooks 02-169208-00 wafer processing robot is an automated robot designed by Brooks Automation specifically for semiconductor manufacturing and wafer processing. This robot is used for precise handling, positioning, and transportation in wafer processing processes, and is suitable for high cleanliness environments such as cleanrooms. Its reliable design, precise control system, and efficient handling capability make it an important tool in semiconductor production and testing processes.

Main features:

High precision handling:

The Brooks 02-169208-00 robot is capable of achieving micrometer level wafer positioning, ensuring the accuracy of the wafer during transportation. Its high-precision design meets the demand for minimal error tolerance in semiconductor manufacturing.

Its control system provides a smooth and stable motion path, thereby reducing the vibration of the wafer during transportation and lowering the risk of wafer damage.

Multi axis control and flexible operation:

Equipped with a multi axis control system, supporting free movement in multiple directions and angles. Robots can easily perform complex movements such as translation, rotation, and tilt to meet the different import and export needs of various devices.

The flexible design enables it to operate freely in small or complex equipment arrangements, increasing the diversity of production line layouts.

High speed handling capacity:

This robot is able to complete wafer handling at a faster speed, optimizing the transfer time between process steps and thus improving the efficiency of the entire production line. Its rapid response system ensures high-speed transmission while maintaining accuracy.

Cleanroom compatible design:

The material and structural design of Brooks 02-169208-00 meet the strict standards of cleanrooms, with low particle generation and low contamination risk, suitable for long-term stable operation in cleanroom environments, and protecting wafers from contamination.

The dust-proof design and high durability materials enable it to operate in clean rooms and minimize interference with the environment.

Intelligent monitoring and self diagnosis:

Equipped with an intelligent monitoring system, it can monitor the handling and operation status in real time, and provide fault detection and diagnosis functions. This self diagnostic function can help the operations team discover and solve problems in a timely manner, reducing the risk of unexpected downtime.

Support connection with the upper computer, capable of analyzing and recording data on operating status, performance indicators, etc., to help optimize production efficiency.

Modular design:

Designed with a modular structure, it is easy to integrate with other Brooks equipment or third-party wafer processing equipment. Modular design facilitates expansion, upgrading, and maintenance, providing support for the flexibility of production lines.

This feature enables it to be configured and adjusted according to specific needs to meet the requirements of different wafer sizes or process flows.

2.产      品      展      示      

3.其他产品

ABB LD800HSE 总线模块

ABB REG670 1MRK002826-AC 安全系统组件

GE IS215UCVEM08B 处理器板类型

4.其他英文产品

AMAT 0190-11415 Digital Input Module

RADISYS EXM-HDEXM-MX Memory Module

RADISYS 61-0159-03 CPU circuit board

5.更多库存型号

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs.co

品牌：Brooks

型号： 02-169208-00晶圆处理机器人

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货