Brooks TT1ENR2-1-TVS-ES机器人控制器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Brooks TT1ENR2-1-TVS-ES 机器人控制器 是Brooks Automation为半导体和高科技制造行业设计的高精度控制器,专门用于管理和控制晶圆搬运机器人的运动。该控制器支持复杂的运动编程,能够高效控制机器人实现精确的晶圆搬运和定位。Brooks TT1ENR2-1-TVS-ES控制器通常配合Brooks系列晶圆传输机器人使用,以确保生产过程的稳定性和精确性。
主要特点:
精确的运动控制:
- TT1ENR2-1-TVS-ES控制器采用先进的运动控制算法,能够实现多轴同步控制,确保机器人在复杂路径下的精准运动。它可以控制机器人以微米级的精度进行定位,以适应半导体制造中对精度的高要求。
高效的响应速度:
- 控制器具备快速响应能力,可以实时调整机器人的位置和速度。这一特性在需要高效率的生产环境中尤为重要,能够减少搬运周期,提高生产线的整体效率。
模块化与灵活性:
- 设计上采用模块化结构,便于集成到不同类型的自动化系统中。该控制器可以与不同型号的Brooks机器人兼容,并能够根据生产需求进行配置,使其在多种生产环境中具有高度适应性。
洁净室兼容设计:
- 该控制器符合半导体洁净室的严格要求,具备低颗粒排放的特性,适用于无尘生产环境中运行,确保在敏感的制造环境中不会污染晶圆表面。
智能监控与诊断功能:
- 配备自诊断和智能监控系统,可以实时检测运行状态并提供反馈信息,便于运维人员及时监控和维护。若控制器检测到异常情况,可以自动调整并发出报警,防止故障扩大。
支持多种通信接口:
- Brooks TT1ENR2-1-TVS-ES控制器支持多种工业通信协议,包括Ethernet、RS-232、RS-485等,方便与上位机或工厂信息系统进行连接和数据传输,实现集中控制和数据管理。
安全功能:
- 配备多层安全机制,如过载保护、紧急停止和自动恢复等功能,确保机器人在运行过程中不会对设备或晶圆造成损伤。该安全功能特别适用于高价值的晶圆搬运过程,降低了生产风险。
英文资料:
The Brooks TT1ENR2-1-TVS-ES robot controller is a high-precision controller designed by Brooks Automation for the semiconductor and high-tech manufacturing industries, specifically designed to manage and control the motion of wafer handling robots. This controller supports complex motion programming and can efficiently control robots to achieve precise wafer handling and positioning. The Brooks TT1ENR2-1-TVS-ES controller is typically used in conjunction with the Brooks series wafer transfer robots to ensure stability and accuracy in the production process.
Main features:
Accurate motion control:
The TT1ENR2-1-TVS-ES controller adopts advanced motion control algorithms, which can achieve multi axis synchronous control and ensure precise motion of the robot in complex paths. It can control robots to position with micrometer level accuracy to meet the high precision requirements in semiconductor manufacturing.
Efficient response speed:
The controller has fast response capability and can adjust the position and speed of the robot in real time. This feature is particularly important in production environments that require high efficiency, as it can reduce handling cycles and improve the overall efficiency of the production line.
Modularity and flexibility:
The design adopts a modular structure, which facilitates integration into different types of automation systems. This controller is compatible with different models of Brooks robots and can be configured according to production needs, making it highly adaptable in various production environments.
Cleanroom compatible design:
This controller meets the strict requirements of semiconductor cleanrooms, has low particle emissions, and is suitable for operation in dust-free production environments, ensuring that the wafer surface will not be contaminated in sensitive manufacturing environments.
Intelligent monitoring and diagnostic functions:
Equipped with self diagnosis and intelligent monitoring system, it can detect the operating status in real time and provide feedback information, making it easy for operation and maintenance personnel to monitor and maintain in a timely manner. If the controller detects an abnormal situation, it can automatically adjust and issue an alarm to prevent the fault from expanding.
Supports multiple communication interfaces:
The Brooks TT1ENR2-1-TVS-ES controller supports multiple industrial communication protocols, including Ethernet, RS-232, RS-485, etc., making it easy to connect and transmit data with the upper computer or factory information system, achieving centralized control and data management.
Security function:
Equipped with multiple layers of safety mechanisms, such as overload protection, emergency stop, and automatic recovery, to ensure that the robot will not cause damage to equipment or wafers during operation. This security feature is particularly suitable for high-value wafer handling processes, reducing production risks.
2.产 品 展 示
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5.更多库存型号
PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
PMB31B-10216-00 | AMAT 0100-00010 | 57160001-UNC DSTD 150B |
PMB31B-10214-03 | IMASI23 | 3BSE003912R1 RF541 |
PMB31B-10214-02 | AMAT 0100-00013 | PFTL101B 2.0KN 3BSE004185R1 |
PMB31B-10214-01 | IEFAN01 | 57160001-ADF DSDP 170 |
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