Brooks 002-7090-11 晶圆传输机器人 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Brooks 002-7090-11 晶圆传输机器人 是Brooks Automation公司专为半导体和电子制造业设计的一款高性能晶圆搬运机器人。该机器人用于在不同工艺设备之间搬运晶圆，帮助实现生产流程的自动化、精准化和高效化。它广泛应用于半导体制造中的多个环节，如晶圆清洗、蚀刻、涂层、曝光和检测等工艺步骤。
主要特点：
高精度定位与搬运：
- Brooks 002-7090-11 机器人采用先进的定位技术，能够实现亚微米级的定位精度，确保晶圆在传输过程中的位置准确无误。
- 其搬运系统经过优化，可以在高速度下维持稳定性，降低晶圆传输过程中的振动，减少对晶圆表面的潜在损伤。
多自由度运动控制：
- 配备多轴、多自由度控制系统，能够在不同的平面上移动和旋转晶圆，满足复杂工艺对位置和角度的精确要求。这一功能尤其适合需要调整晶圆朝向或高度的工艺步骤。
洁净室兼容性：
- 设计符合半导体行业的洁净室标准，具有低颗粒排放特性，能够在超净环境中长期稳定运行，避免对晶圆表面造成污染。
- 材质和设计都经过优化，可在洁净室的高要求环境下运行，同时降低维护需求。
高速传输能力：
- Brooks 002-7090-11 机器人在保持精度的同时具有快速搬运能力，有助于缩短工艺设备之间的传输时间，从而提高生产效率。
- 支持连续搬运多个晶圆，适合高产量的生产线，优化了制造流程的整体速度。
模块化设计与灵活性：
- 采用模块化设计，能够轻松集成到不同的自动化设备或生产线中，适应性强。用户可以根据生产需求灵活配置，便于扩展和升级。
- 支持与其他Brooks设备以及第三方控制系统的集成，确保整个自动化系统的兼容性和一致性。
智能化控制与反馈系统：
- 配备智能控制系统，支持实时监控和位置调整，能够根据晶圆位置自动校正，确保搬运过程的稳定和准确。
- 具备自诊断功能，能够检测并反馈自身运行状态，降低停机时间，便于运维人员及时响应。
英文资料：
The Brooks 002-7090-11 wafer transfer robot is a high-performance wafer handling robot designed by Brooks Automation specifically for the semiconductor and electronic manufacturing industries. This robot is used to transport wafers between different process equipment, helping to achieve automation, precision, and efficiency in the production process. It is widely used in multiple stages of semiconductor manufacturing, such as wafer cleaning, etching, coating, exposure, and inspection processes.
Main features:
High precision positioning and handling:
The Brooks 002-7090-11 robot adopts advanced positioning technology, which can achieve sub micron level positioning accuracy and ensure accurate positioning of wafers during transportation.
The handling system has been optimized to maintain stability at high speeds, reduce vibration during wafer transport, and minimize potential damage to the wafer surface.
Multi degree of freedom motion control:
Equipped with a multi axis and multi degree of freedom control system, the wafer can be moved and rotated on different planes to meet the precise requirements of complex processes for position and angle. This feature is particularly suitable for process steps that require adjusting wafer orientation or height.
Cleanroom compatibility:
Designed to meet the cleanroom standards of the semiconductor industry, with low particle emission characteristics, capable of long-term stable operation in ultra clean environments, and avoiding contamination of wafer surfaces.
The material and design have been optimized to operate in high demand environments in clean rooms while reducing maintenance requirements.
High speed transmission capability:
The Brooks 002-7090-11 robot has fast handling capabilities while maintaining accuracy, which helps shorten the transfer time between process equipment and improve production efficiency.
Supports continuous handling of multiple wafers, suitable for high-yield production lines, optimizing the overall speed of the manufacturing process.
Modular design and flexibility:
Adopting modular design, it can be easily integrated into different automation equipment or production lines, with strong adaptability. Users can flexibly configure according to production needs, making it easy to expand and upgrade.
Support integration with other Brooks devices and third-party control systems to ensure compatibility and consistency of the entire automation system.
Intelligent control and feedback system:
Equipped with an intelligent control system that supports real-time monitoring and position adjustment, it can automatically correct the wafer position to ensure stability and accuracy during the handling process.
Equipped with self diagnostic function, it can detect and provide feedback on its own operating status, reduce downtime, and facilitate timely response by operation and maintenance personnel.
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-66253 Communication Module
AMAT 0190-11415 Digital Input Module
5.更多库存型号
| PMB31B-20101-03 | NKMF02-02 | M22NRXC-LDN-NS-00 |
| PMB31B-20101-02 | AMAT 0100-09210 | 57160001-UH DSTD 150 |
| PMB31B-20101-01 | AMAT 0100-20265 | PFRL 101C |
| PMB31B-20101-00 | 07KT93 | P21NSXS-LSS-NS-06 |
| PMB31B-20100-03 | AMAT 0120-93660 | 57160001-PK DSDI 125 |
| PMB31B-20100-02 | PHARPS32000000 | M22NSXB-IDS-NS-02 |
| PMB31B-20100-01 | GJR5250000R0202 | N41HRFL-LNK-NS-00 |
| PMB31B-20100-00 | DOT100 | 57160001-ACX DSDP 140B |
| PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
| PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
| PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
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