Brooks 001-0000-41晶圆索引器  PDF资料

1.产 品 资 料 介 绍：

中文资料：

Brooks 001-0000-41 晶圆索引器 是Brooks Automation公司设计的一款专用于半导体制造和处理中的晶圆定位和搬运设备。该索引器用于自动化晶圆搬运系统中，通过精确的定位和转动功能，将晶圆传送到指定的工艺步骤中。其设计考虑了半导体生产的洁净度和精度要求，是高效晶圆处理流程中的关键组件之一。

主要特点：

1. 高精度定位：

• Brooks 001-0000-41 晶圆索引器提供了高精度的旋转和定位控制，确保晶圆在各个工艺步骤中的位置准确。这种精确定位有助于提高生产一致性，减少晶圆在搬运过程中的位置偏差。
• 精密定位功能允许对晶圆进行微调，以适应不同设备和工艺的需求。

2. 快速响应时间：

• 该索引器能够以极短的响应时间进行位置调整，适合高速度、高产量的生产环境。它可以在多个工艺步骤之间迅速移动晶圆，提高整个生产线的效率。

3. 耐用性和洁净度：

• 设计符合半导体制造的洁净室标准，材料具有低颗粒产生特性，能够在洁净室环境中长时间运行而不会污染晶圆表面。
• 具有良好的耐用性，能够承受连续运行，适应半导体制造的严苛环境要求。

4. 多轴同步控制：

• 索引器配备多轴控制系统，可控制晶圆的旋转、倾斜和精确位置调整，满足多样化的工艺需求。多轴控制特别适合在晶圆检测、图案对准等环节中使用。

5. 兼容性和模块化设计：

• Brooks 001-0000-41 索引器具有模块化设计，可与其他Brooks或第三方自动化设备兼容。其设计便于集成到不同品牌和型号的晶圆处理系统中，提升了系统的灵活性。
• 索引器支持多种安装方式，可以灵活配置在各种设备中，包括清洗、曝光和蚀刻等设备。

6. 实时反馈与监控：

• 配备传感器和反馈系统，支持实时监控和位置调整。这种功能允许在运行中对设备进行自我诊断，减少因故障导致的停机时间。
• 支持与上位控制系统的通信接口，使操作人员可以实时获取设备状态，及时进行维护。

英文资料：

The Brooks 001-0000-41 wafer index is a wafer positioning and handling equipment designed by Brooks Automation specifically for semiconductor manufacturing and processing. This index is used in automated wafer handling systems to transfer wafers to designated process steps through precise positioning and rotation functions. Its design takes into account the cleanliness and precision requirements of semiconductor production, and is one of the key components in efficient wafer processing.

Main features:

High precision positioning:

The Brooks 001-0000-41 wafer index provides high-precision rotation and positioning control, ensuring the accurate position of the wafer in each process step. This precise positioning helps improve production consistency and reduce positional deviations of wafers during handling.

The precise positioning function allows for fine-tuning of the wafer to meet the needs of different equipment and processes.

Fast response time:

This index can adjust the position with extremely short response time, suitable for high-speed and high-yield production environments. It can quickly move wafers between multiple process steps, improving the efficiency of the entire production line.

Durability and cleanliness:

Designed to meet the clean room standards of semiconductor manufacturing, the material has low particle generation characteristics and can operate for a long time in a clean room environment without contaminating the wafer surface.

Has good durability, can withstand continuous operation, and adapts to the harsh environmental requirements of semiconductor manufacturing.

Multi axis synchronous control:

The indexing device is equipped with a multi axis control system, which can control the rotation, tilt, and precise position adjustment of the wafer to meet diverse process requirements. Multi axis control is particularly suitable for use in wafer inspection, pattern alignment, and other processes.

Compatibility and modular design:

The Brooks 001-0000-41 indexer features a modular design that is compatible with other Brooks or third-party automation devices. Its design facilitates integration into wafer processing systems of different brands and models, enhancing the flexibility of the system.

The indexer supports multiple installation methods and can be flexibly configured in various devices, including cleaning, exposure, and etching equipment.

Real time feedback and monitoring:

Equipped with sensors and feedback systems, supporting real-time monitoring and position adjustment. This feature allows for self diagnosis of the device during operation, reducing downtime caused by malfunctions.

Support communication interface with the upper control system, allowing operators to obtain real-time device status and perform maintenance in a timely manner.

2.产      品      展      示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs.co

品牌： Brooks

型号：001-0000-41晶圆索引器 

质保：一年

成色：全新/二手

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