Brooks 486DX2 晶圆机器人控制器 PDF资料

1.产 品 资 料 介 绍：

中文资料：

Brooks 486DX2 晶圆机器人控制器 是一款专为半导体制造环境中的晶圆搬运和自动化系统设计的控制器。它通常用于集成在晶圆传输和处理的自动化设备中，帮助实现高效、精确的晶圆搬运过程。以下是该控制器的一些关键特点和应用：

主要特点：

1. 高性能处理器：

• 486DX2 是一款基于Intel 486架构的高性能处理器，具备较高的计算能力和数据处理速度，能够快速响应机器人控制系统的需求。
• 即便处理器已经相对过时，但它在早期的半导体自动化设备中被广泛应用，具备稳定的计算性能，能够满足大多数基本控制要求。

2. 多轴运动控制：

• 该控制器支持多轴机器人控制，通常可用于控制四轴或六轴机械臂或其他类型的自动化装置。控制器能够精确地协调不同轴的运动，以便在晶圆搬运时保证位置精度和动作的平稳性。

3. 实时控制能力：

• Brooks 486DX2 控制器具备实时处理能力，可以迅速响应输入信号，从而实现精确的机器人操作。该特性对于晶圆搬运任务至关重要，因为它能够确保每次搬运的精确度，避免晶圆受到损坏或污染。

4. I/O接口：

• 配备多个输入/输出接口，用于连接传感器、执行器以及其他自动化设备，确保机器人能够与外部系统进行有效的通信和交互。
• 常见的接口包括数字输入/输出、模拟输入/输出、以及串行通信接口（如RS-232、RS-485）。

5. 编程和调试：

• 该控制器通常支持自定义编程，可以使用不同的编程语言进行配置和调试。常见的编程方式包括G代码或特定的机器人编程语言。
• 对于调试和维护，系统提供了详细的诊断功能，能够帮助工程师进行故障排查和性能调优。

6. 可靠性与稳定性：

• 在晶圆搬运环境中，可靠性和稳定性至关重要。Brooks 486DX2 控制器被设计为在苛刻的生产环境中长期运行，能够承受一定的温度、湿度和电磁干扰。

7. 与其他系统的兼容性：

• Brooks 486DX2 控制器通常能够与其他厂商的设备和系统进行兼容，通过标准化的通信协议（如SECS/GEM、Modbus等）与上位机或其他自动化控制系统进行连接。

应用领域：

1. 半导体制造：

• Brooks 486DX2 控制器主要应用于半导体制造的自动化系统中，尤其是在晶圆搬运、晶圆传输、清洗、涂布等环节中。它能够实现晶圆在不同处理步骤之间的精确移动，并确保搬运过程的洁净性和无损性。

2. 晶圆测试与检测：

• 用于将晶圆从一台设备搬运到另一台设备，或将其送到测试平台进行电气性能检测。

3. 自动化生产线：

• 可与其他自动化设备（如自动化搬运机、堆垛机、材料传输装置）结合，形成完整的自动化生产线，提升半导体制造过程的生产效率和一致性。

4. 实验室自动化：

• 在一些高精度实验室中，晶圆搬运机器人也有应用，尤其是在新材料或新工艺开发过程中，能够在不同实验装置之间精准地转移晶圆。

英文资料：

The Brooks 486DX2 wafer robot controller is a controller designed specifically for wafer handling and automation systems in semiconductor manufacturing environments. It is typically integrated into automated equipment for wafer transfer and processing, helping to achieve efficient and precise wafer handling processes. Here are some key features and applications of the controller:

Main features:

High performance processor:

486DX2 is a high-performance processor based on Intel 486 architecture, which has high computing power and data processing speed, and can quickly respond to the needs of robot control systems.

Even though the processor is relatively outdated, it was widely used in early semiconductor automation equipment, with stable computing performance that can meet most basic control requirements.

Multi axis motion control:

This controller supports multi axis robot control and is typically used to control four - or six axis robotic arms or other types of automation devices. The controller can accurately coordinate the movements of different axes to ensure positional accuracy and smooth motion during wafer handling.

Real time control capability:

The Brooks 486DX2 controller has real-time processing capabilities and can quickly respond to input signals, enabling precise robot operations. This feature is crucial for wafer handling tasks as it ensures the accuracy of each handling and avoids damage or contamination of the wafer.

I/O interface:

Equipped with multiple input/output interfaces for connecting sensors, actuators, and other automation devices, ensuring that the robot can effectively communicate and interact with external systems.

Common interfaces include digital input/output, analog input/output, and serial communication interfaces (such as RS-232, RS-485).

Programming and Debugging:

This controller typically supports custom programming and can be configured and debugged using different programming languages. Common programming methods include G-code or specific robot programming languages.

For debugging and maintenance, the system provides detailed diagnostic functions that can help engineers troubleshoot and optimize performance.

Reliability and stability:

Reliability and stability are crucial in the wafer handling environment. The Brooks 486DX2 controller is designed to operate in harsh production environments for extended periods of time and can withstand certain temperatures, humidity, and electromagnetic interference.

Compatibility with other systems:

The Brooks 486DX2 controller is typically compatible with devices and systems from other manufacturers, and can be connected to upper computers or other automation control systems through standardized communication protocols such as SECS/GEM, Modbus, etc.

Application areas:

Semiconductor manufacturing:

The Brooks 486DX2 controller is mainly used in automation systems for semiconductor manufacturing, especially in processes such as wafer handling, wafer transfer, cleaning, and coating. It can achieve precise movement of wafers between different processing steps and ensure the cleanliness and non-destructive nature of the handling process.

Wafer testing and inspection:

Used to transport wafers from one device to another or send them to a testing platform for electrical performance testing.

automatic production line:

It can be combined with other automation equipment such as automated handling machines, stackers, and material transfer devices to form a complete automated production line, improving the production efficiency and consistency of the semiconductor manufacturing process.

Laboratory automation:

In some high-precision laboratories, wafer handling robots are also used, especially in the development of new materials or processes, which can accurately transfer wafers between different experimental devices.

2.产      品      展      示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs.co

品牌：Brooks

型号：486DX2 晶圆机器人控制器

质保：一年

成色：全新/二手

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