Brooks 002-7391-07晶圆对齐器 PDF资料

1.产 品 资 料 介 绍：

中文资料：

Brooks 002-7391-07 晶圆对齐器 是 Brooks Automation 提供的一款高精度自动化设备，主要用于晶圆制造、半导体工艺以及其他精密制造过程中的晶圆对位与对准任务。它在晶圆处理过程中，确保晶圆的正确定位与对齐，从而提高制造过程的精度和效率。

主要特点和功能：

1. 高精度对位：

• Brooks 002-7391-07 晶圆对齐器 采用先进的光学和机械技术，能够在极高的精度下执行晶圆对准操作。其精度通常可达到微米级别，确保晶圆在后续处理过程中的位置精确无误。

2. 自动化操作：

• 该对齐器支持全自动化操作，能够自动进行晶圆的加载、对位、校准和卸载。自动化设计减少了人工干预，提升了工作效率和一致性。

3. 兼容多种晶圆尺寸：

• 该设备能够处理不同尺寸的晶圆，包括常见的 200mm 和 300mm 晶圆，适用于多种半导体工艺和光伏应用。

4. 实时监控与反馈：

• 设备具备实时监控功能，能够实时监控晶圆对位状态。通过反馈机制，系统能够调整晶圆的位置，确保对齐的准确性。

5. 高可靠性与稳定性：

• Brooks 002-7391-07 晶圆对齐器 设计具有高抗干扰能力，能够在恶劣环境下稳定工作。它的耐用性使其在半导体和光伏行业中得到广泛应用，能确保长时间连续稳定运行。

6. 模块化设计：

• 该设备具有模块化设计，可以根据实际需求灵活配置不同的对位模块，适应不同的生产需求和工艺要求。

7. 易于集成：

• 该对齐器能够与其他半导体生产设备，如刻蚀机、光刻机、薄膜沉积机等设备进行无缝集成。其标准化接口支持快速与现有自动化生产线的集成。

8. 支持多种控制协议：

• 支持 Ethernet/IP、Modbus TCP/IP 和 RS-232/485 等多种工业通信协议，确保能够与其他设备进行高效通信和数据传输。

9. 简化维护：

• 该对齐器设计简洁，具有易于访问的维护接口，使得维护和修理过程更加高效，减少停机时间。

英文资料：

The Brooks 002-7391-07 wafer aligner is a high-precision automation equipment provided by Brooks Automation, mainly used for wafer alignment and alignment tasks in wafer manufacturing, semiconductor processes, and other precision manufacturing processes. It ensures the correct positioning and alignment of the wafer during wafer processing, thereby improving the accuracy and efficiency of the manufacturing process.

Main features and functions:

High precision alignment:

The Brooks 002-7391-07 wafer aligner utilizes advanced optical and mechanical technologies to perform wafer alignment operations with extremely high precision. Its accuracy can usually reach the micrometer level, ensuring precise positioning of the wafer during subsequent processing.

Automated operation:

This aligner supports fully automated operations and can automatically load, align, calibrate, and unload wafers. Automated design reduces manual intervention, improves work efficiency and consistency.

Compatible with multiple wafer sizes:

This device is capable of processing wafers of different sizes, including common 200mm and 300mm wafers, and is suitable for various semiconductor processes and photovoltaic applications.

Real time monitoring and feedback:

The equipment has real-time monitoring function, which can monitor the wafer alignment status in real time. Through a feedback mechanism, the system can adjust the position of the wafer to ensure accurate alignment.

High reliability and stability:

The Brooks 002-7391-07 wafer aligner design has high anti-interference ability and can operate stably in harsh environments. Its durability makes it widely used in the semiconductor and photovoltaic industries, ensuring long-term continuous and stable operation.

Modular design:

This device has a modular design that allows for flexible configuration of different alignment modules according to actual needs, adapting to different production and process requirements.

Easy to integrate:

This aligner can be seamlessly integrated with other semiconductor production equipment, such as etching machines, lithography machines, thin film deposition machines, etc. Its standardized interface supports rapid integration with existing automated production lines.

Supports multiple control protocols:

Supports various industrial communication protocols such as Ethernet/IP, Modbus TCP/IP, and RS-232/485, ensuring efficient communication and data transmission with other devices.

Simplified maintenance:

The aligner has a simple design and an easily accessible maintenance interface, making maintenance and repair processes more efficient and reducing downtime.

2.产      品      展      示      

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5.更多库存型号

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs.co

品牌：Brooks

型号： Brooks 002-7391-07晶圆对齐器

质保：一年

成色：全新/二手

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