Brooks T1104-11-290-14气体压缩机模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Brooks T1104-11-290-14 气体压缩机模块 是 Brooks Automation 提供的一款专用于半导体和其他高科技工业应用中的气体管理系统模块。该气体压缩机模块主要用于提供高压气体、精确控制气体流量和压力，以满足特定的生产需求。气体压缩机模块常见于气体输送、气体配备系统及其他需要精准气体控制的自动化应用。
主要特点和功能：
高效能气体压缩：
- Brooks T1104-11-290-14 气体压缩机模块 设计用于高效压缩气体，能够提供稳定且可靠的气体供应，适用于需要持续、高压气体供应的生产线和实验室应用。
精确的气体流量控制：
- 配备高精度的流量控制系统，能够精确控制气体的流量和压力。这对于半导体制造过程中对气体供应有严格要求的工艺（如刻蚀、薄膜沉积等）至关重要。
稳定的输出：
- 气体压缩机模块的设计保证其在长时间的操作中保持稳定的性能，能够承受较高的工作负荷，适合24/7运行的工业环境。
自动化和智能控制：
- 该模块配备智能控制系统，可以通过自动调节气体流量和压力，以适应不同的工作需求。通过与其他自动化设备和控制系统集成，实现气体管理的自动化，减少人工干预。
兼容性强：
- Brooks T1104-11-290-14 气体压缩机模块 可与多种气体输送系统、气体储存设备以及其他实验室或工业设备兼容使用。其灵活性使其成为多种气体处理系统的核心组成部分。
高可靠性和耐用性：
- 该模块采用高质量的材料和先进的设计，以确保其在极端工作条件下仍能保持长时间的稳定运行。其耐用性使其适合于苛刻的工业环境，减少维护和故障率。
低噪音和低振动设计：
- 气体压缩机模块通常具有低噪音和低振动的特点，尤其在对操作环境有较高要求的实验室或洁净室中，能够降低噪音污染，符合相关操作规范。
节能设计：
- 该气体压缩机模块通过高效能设计，实现节能运行，在保证输出稳定的同时，降低能耗，帮助降低运营成本。
英文资料：
The Brooks T1104-11-290-14 gas compressor module is a gas management system module provided by Brooks Automation, specifically designed for semiconductor and other high-tech industrial applications. This gas compressor module is mainly used to provide high-pressure gas, accurately control gas flow and pressure to meet specific production needs. Gas compressor modules are commonly used in gas delivery, gas supply systems, and other automation applications that require precise gas control.
Main features and functions:
High efficiency gas compression:
The Brooks T1104-11-290-14 gas compressor module is designed for efficient gas compression, providing stable and reliable gas supply, suitable for production lines and laboratory applications that require continuous, high-pressure gas supply.
Accurate gas flow control:
Equipped with a high-precision flow control system, it can accurately control the flow rate and pressure of gases. This is crucial for processes in semiconductor manufacturing that have strict requirements for gas supply, such as etching, thin film deposition, etc.
Stable output:
The design of the gas compressor module ensures stable performance during long-term operation, can withstand high workloads, and is suitable for 24/7 industrial environments.
Automation and intelligent control:
This module is equipped with an intelligent control system that can automatically adjust gas flow and pressure to meet different work requirements. By integrating with other automation equipment and control systems, achieve automation of gas management and reduce manual intervention.
Strong compatibility:
The Brooks T1104-11-290-14 gas compressor module is compatible with various gas delivery systems, gas storage equipment, and other laboratory or industrial equipment. Its flexibility makes it a core component of various gas processing systems.
High reliability and durability:
This module adopts high-quality materials and advanced design to ensure its stable operation for a long time even under extreme working conditions. Its durability makes it suitable for harsh industrial environments, reducing maintenance and failure rates.
Low noise and low vibration design:
Gas compressor modules typically have the characteristics of low noise and low vibration, especially in laboratories or clean rooms with high requirements for operating environments, which can reduce noise pollution and comply with relevant operating standards.
Energy saving design:
The gas compressor module achieves energy-saving operation through efficient design, ensuring stable output while reducing energy consumption and helping to lower operating costs.
2.产 品 展 示
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