KLA TENCOR 92117-01-1伺服驱动器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA-Tencor 92117-01-1伺服驱动器是一款高精度伺服驱动器，用于半导体制造设备中的运动控制和精密操作。以下是该伺服驱动器的一些详细信息：
主要功能
- 精确运动控制：提供高精度的运动控制能力，确保设备的运动部件按照预设轨迹和速度运行。
- 高响应速度：具备快速响应特性，适合高动态和快速调整的应用场合。
- 反馈控制：与位置传感器和编码器配合使用，实现精确的闭环控制和反馈调节。
应用领域
- 半导体制造设备：广泛应用于晶圆加工、光刻、蚀刻、薄膜沉积等设备中，精确控制机械臂、扫描系统等部件的运动。
- 高精度自动化：在需要高度精密和快速响应的自动化生产线中，用于驱动和控制各种运动组件。
- 精密测试仪器：用于各种测试设备中，实现对样品的精确定位和移动。
产品特点
- 高性能：设计用于支持高带宽、高精度的伺服控制，适应高速和高精度的操作需求。
- 稳定性：具有出色的稳定性和可靠性，能够在严苛的工业环境中稳定运行。
- 灵活配置：支持多种配置选项，能够与不同的传感器和执行器配合使用，满足多样化的应用需求。
- 集成性：与KLA-Tencor的其他控制系统和设备紧密集成，形成高效的自动化解决方案。
安装与集成
KLA-Tencor 92117-01-1伺服驱动器通常安装在半导体设备的控制柜或机架中。通过标准化的电气接口和通信协议，与设备的其他部分进行连接。安装过程中需要确保驱动器与伺服电机和传感器的匹配，优化系统性能。
英文资料：
KLA Tencor 92117-01-1 servo driver is a high-precision servo driver used for motion control and precision operations in semiconductor manufacturing equipment. Here are some detailed information about the servo drive:
major function
Precise motion control: Provides high-precision motion control capabilities to ensure that the moving parts of the equipment operate according to preset trajectories and speeds.
High response speed: With fast response characteristics, it is suitable for applications with high dynamics and quick adjustments.
Feedback control: Used in conjunction with position sensors and encoders to achieve precise closed-loop control and feedback adjustment.
application area
Semiconductor manufacturing equipment: widely used in wafer processing, photolithography, etching, thin film deposition and other equipment to precisely control the movement of components such as robotic arms and scanning systems.
High precision automation: used to drive and control various moving components in automated production lines that require high precision and fast response.
Precision testing instruments: used in various testing equipment to achieve precise positioning and movement of samples.
Product Features
High performance: designed to support high bandwidth, high-precision servo control, and adapt to high-speed and high-precision operational requirements.
Stability: It has excellent stability and reliability, and can operate stably in harsh industrial environments.
Flexible configuration: Supports multiple configuration options and can be used in conjunction with different sensors and actuators to meet diverse application needs.
Integration: Closely integrated with other control systems and equipment of KLA Tencor to form an efficient automation solution.
Installation and integration
The KLA Tencor 92117-01-1 servo drive is typically installed in the control cabinet or rack of semiconductor equipment. Connect with other parts of the equipment through standardized electrical interfaces and communication protocols. During the installation process, it is necessary to ensure the matching of the driver with the servo motor and sensor, and optimize the system performance.
2.产 品 展 示
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5.更多库存型号
| R65HENA-R2-NS-NV-00 | R32GENP-R2-NS-VS-00 | R22GENT-TS-NS-NV-00 |
| R46HENA-R2-NS-NV-00 | R34JENT-TS-LB-NV-01 | R34KMNC-R2-NS-NV-00 |
| R82SSNA-NP-RM-NV-02 | R33HENA-R2-NS-NV-02 | R43HENA-R2-NS-NV-00 |
| R84GMNA-R2-NS-NV-00 | R33GSNT-TS-NS-NV-02 | R24SSNA-R1-NS-NV-07 |
| R46GSNA-TS-NS-NV-09 | R33HSNC-HS-NF-NV-02 | R34JENC-TS-NF-NV-00 |
| R46GENH-R2-NS-NV-00 | R21HSNA-R1-NS-VS-04 | R32GENP-R2-NS-NV-00 |
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