KLA-TENCOR 28-0171 XP-POWER高压电源模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA-Tencor 28-0171 XP-POWER 是一款高压电源模块，专为半导体制造设备设计，提供稳定的高电压输出。KLA-Tencor 是半导体制造领域的领导者，其产品涵盖了过程控制、缺陷检测和高精度测量等多个方面。
产品功能
- 高压电源供应：28-0171 XP-POWER 提供高电压输出，通常用于需要高电压的半导体制造过程，如等离子体刻蚀、沉积等。
- 精确电压调节：具备高精度电压调节功能，能够在严格的电压要求下提供稳定的输出，确保设备的精确操作。
- 高功率输出：设计用于提供高功率输出，以满足高电压需求的工业应用。
- 保护功能：内置过压、过流、短路等保护功能，防止高压电源模块和相关设备受损。
应用领域
- 半导体制造设备：广泛应用于半导体制造中的刻蚀机、沉积机和其他需要高电压的设备。它为这些设备的关键组件提供所需的高压电源。
- 等离子体处理：用于等离子体处理过程中的高压电源供应，支持精确的等离子体生成和控制。
- 高能量实验：在一些高能物理实验或材料处理过程中，也可以使用此类高压电源模块。
技术优势
- 稳定性和可靠性：提供高稳定性和可靠性的高压电源，确保设备在各种工作条件下的正常运作。
- 高精度：能够实现精确的电压控制，适应对电压要求严格的应用场景。
- 安全保护：内置多种保护机制，如过压、过流和短路保护，保障设备和操作人员的安全。
- 耐用性：设计用于高负荷和苛刻环境，具有较长的使用寿命。
英文资料：
KLA Tencor 28-0171 XP-POWER is a high-voltage power module designed specifically for semiconductor manufacturing equipment, providing stable high-voltage output. KLA Tencor is a leader in the semiconductor manufacturing industry, with products covering multiple aspects such as process control, defect detection, and high-precision measurement.
Product Features
High voltage power supply: The 28-0171 XP-POWER provides high voltage output, typically used in semiconductor manufacturing processes that require high voltage, such as plasma etching, deposition, etc.
Accurate voltage regulation: With high-precision voltage regulation function, it can provide stable output under strict voltage requirements, ensuring the precise operation of the equipment.
High power output: designed to provide high power output to meet industrial applications with high voltage requirements.
Protection function: Built in overvoltage, overcurrent, short circuit and other protection functions to prevent damage to high-voltage power modules and related equipment.
application area
Semiconductor manufacturing equipment: widely used in etching machines, deposition machines, and other devices that require high voltage in semiconductor manufacturing. It provides the necessary high-voltage power supply for the key components of these devices.
Plasma treatment: used for high-voltage power supply in the plasma treatment process, supporting precise plasma generation and control.
High energy experiments: Such high-voltage power modules can also be used in some high-energy physics experiments or material processing processes.
Technical advantages
Stability and reliability: Provide high stability and reliability high-voltage power supply to ensure the normal operation of equipment under various working conditions.
High precision: It can achieve precise voltage control and adapt to application scenarios with strict voltage requirements.
Security protection: Built in multiple protection mechanisms, such as overvoltage, overcurrent, and short-circuit protection, to ensure the safety of equipment and operators.
Durability: Designed for high loads and harsh environments, with a long service life.
2.产 品 展 示
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